DocumentCode
503035
Title
Continuous voltage monitoring techniques for improved ESD auditing
Author
Wallash, Al
Author_Institution
Maxtor Corp., Milpitas, CA, USA
fYear
2003
fDate
21-25 Sept. 2003
Firstpage
1
Lastpage
8
Abstract
A technique for continuously measuring the voltage on static sensitive devices, tools or fixtures during handling and processing is described. This technique uses an electrometer and identifies when a device is floating, grounded, or when dangerous metal contact to device inputs is made. The technique is used to show that an ungrounded device can have a surprisingly high voltage, and that ionization during handling may not significantly reduce the peak voltage on the device. It is concluded that continuous voltage monitoring provides critical information about the device and process and helps an ESD auditor understand, solve and even prevent serious ESD problems.
Keywords
earthing; electrical contacts; electrometers; electrostatic discharge; fixtures; ionisation; tools; voltage measurement; ESD auditing; continuous voltage monitoring techniques; electrometer; electrostatic discharge; fixtures; floating device; grounded device; ionization; metal contact; static sensitive device handling; tools; voltage measurement; Bandwidth; Breakdown voltage; Capacitance; Electric breakdown; Electrostatic discharge; Fixtures; Manufacturing processes; Monitoring; Voltage measurement; Voltmeters;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium, 2003. EOS/ESD '03.
Conference_Location
Las Vegas, NV
Print_ISBN
978-1-5853-7057-3
Electronic_ISBN
978-1-5853-7057-3
Type
conf
Filename
5271998
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