Title :
A traceable method for the arc-free characterization and modeling of CDM testers and pulse metrology chains
Author :
Gieser, Horst A. ; Wolf, Heinrich ; Soldner, Wolfgang ; Reichl, Herbert ; Andreini, Antonio ; Natarajan, Mahadeva I. ; Stadler, Wolfgang
Author_Institution :
Fraunhofer-IZM ATIS, Munich, Germany
Abstract :
A traceable low-voltage network analysis in the time and frequency domain is introduced for the arc-free characterization of CDM testers and their metrology chains. An improved tester circuit model is derived from step responses.
Keywords :
arcs (electric); electrostatic discharge; integrated circuit modelling; network analysis; step response; CDM testers; arc-free characterization; charged device model; frequency domain; pulse metrology chains; step response; tester circuit model; time domain; traceable low-voltage network analysis; Circuit testing; Current measurement; Electrostatic discharge; Integrated circuit modeling; Integrated circuit testing; Manufacturing; Metrology; Oscilloscopes; System testing; Voltage;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2003. EOS/ESD '03.
Conference_Location :
Las Vegas, NV
Print_ISBN :
978-1-5853-7057-3
Electronic_ISBN :
978-1-5853-7057-3
