DocumentCode :
503049
Title :
Biased-plate characterization of pulsed DC ionizers
Author :
Crowley, Joseph M. ; Ignatenko, Alexander ; Levit, Larry B.
Author_Institution :
Electrostatic Applic., Morgan Hill, CA, USA
fYear :
2003
fDate :
21-25 Sept. 2003
Firstpage :
1
Lastpage :
6
Abstract :
The operation of a pulsed DC air ionization system was studied in a side-by-side comparison using a charged-plate monitor (CPM) and a biased-plate monitor (BPM). When the pulse period is short compared to the decay time, both methods give equivalent results. When the pulse is not short, however, the CPM suffers from a random error on the order of the pulse period. In addition, the CPM method is quite sensitive to the motion of persons and other objects in its vicinity. Neither of these errors occurs with the BPM, which therefore provides a significantly faster way of adjusting pulsed DC ionizers.
Keywords :
clean rooms; discharges (electric); equivalent circuits; ionisation; biased-plate characterization; charged-plate monitor; equivalent electrical circuit; pulsed DC air ionization system; pulsed DC ionizers; random error; Current measurement; Delay; Electric resistance; Electric variables measurement; Electrical resistance measurement; Electrostatic discharge; Equivalent circuits; Ionization; Monitoring; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2003. EOS/ESD '03.
Conference_Location :
Las Vegas, NV
Print_ISBN :
978-1-5853-7057-3
Electronic_ISBN :
978-1-5853-7057-3
Type :
conf
Filename :
5272012
Link To Document :
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