Title :
A wafer level HBM tester delivering pulses with variable risetime through transmission lines
Author_Institution :
Oryx Instrum. Corp., Fremont, CA, USA
Abstract :
In current HBM wafer level testers long wires between pulse generating circuits and the wafer probe needles distort the HBM waveform. A novel HBM equivalent circuit utilizing constant impedance transmission lines in combination with individual lumped RC-elements close to each pin of the DUT can generate stress pulses with high quality and even variable risetimes. The new concept and its performance and limitations for an HBM tester are discussed.
Keywords :
equivalent circuits; integrated circuit testing; lumped parameter networks; pulse generators; test equipment; transmission lines; HBM equivalent circuit; constant impedance transmission lines; human body model; lumped RC-elements; pulse generating circuit; stress pulses; variable risetime pulses; wafer level HBM tester; wafer probe needle; Circuit testing; Distributed parameter circuits; Equivalent circuits; Impedance; Needles; Probes; Pulse circuits; Pulse generation; Transmission lines; Wires;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2003. EOS/ESD '03.
Conference_Location :
Las Vegas, NV
Print_ISBN :
978-1-5853-7057-3
Electronic_ISBN :
978-1-5853-7057-3
