• DocumentCode
    503388
  • Title

    Measurement of dielectric films´ microwave parameters

  • Author

    Pashkov, V.M. ; Bovtun, V.P. ; Prokopenko, Yu.V. ; Kempa, M. ; Molchanov, V.I. ; Eremenko, A.V. ; Poplavko, Yu M.

  • Author_Institution
    Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
  • fYear
    2009
  • fDate
    14-18 Sept. 2009
  • Firstpage
    769
  • Lastpage
    770
  • Abstract
    A method for studying of the microwave parameters of dielectric films, deposited on high-Q substrate without a metal layer, was developed. The essence of the method is the excitation of a hyperfine dielectric resonator (DR) as a two-layer structure: substrate-film.
  • Keywords
    dielectric measurement; dielectric resonators; dielectric thin films; microwave measurement; thin film devices; dielectric film deposition; high-Q substrate; hyperfine dielectric resonator excitation; microwave parameter measurement; substrate film; two-layer structure; Chromium; Dielectric films; Dielectric measurements; Electrooptical waveguides; Helium; Microwave measurements; Quadratic programming; Rectangular waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave & Telecommunication Technology, 2009. CriMiCo 2009. 19th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-1-4244-4796-1
  • Type

    conf

  • Filename
    5292886
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=503388