DocumentCode
504580
Title
Reducing hysteresis effect of force actuator in a Scanning Probe Microscope
Author
Chang, Po-Kuang ; Lin, Jium-Ming
Author_Institution
Inst. of Technol. & Sci., Chung-Hua Univ., Hsin-Chu, Taiwan
fYear
2009
fDate
18-21 Aug. 2009
Firstpage
5518
Lastpage
5523
Abstract
This research is to use only PI controllers to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). Comparisons with the previous design with Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also made. Generally, the phase margins are larger for the newly proposed method. This improvement has been verified by MATLAB simulation and practical implementation to reduce the hysteresis effect of the force actuator. Thus the new design is cheaper and valuable.
Keywords
PI control; actuators; feedback; force control; hysteresis; nonlinear control systems; scanning probe microscopy; transducers; MATLAB simulation; PI controllers; force actuator; hysteresis effect; inner-loop feedback compensation; linear velocity transducer; scanning probe microscope; Coils; Force control; Force feedback; Hydraulic actuators; MATLAB; Magnetic hysteresis; Scanning probe microscopy; Springs; Thermal conductivity; Transducers; Force actuator; Hysteresis effect; LVDT; LVT; Load cell; PI compensator; SPM;
fLanguage
English
Publisher
ieee
Conference_Titel
ICCAS-SICE, 2009
Conference_Location
Fukuoka
Print_ISBN
978-4-907764-34-0
Electronic_ISBN
978-4-907764-33-3
Type
conf
Filename
5334204
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