Title :
Reducing hysteresis effect of force actuator in a Scanning Probe Microscope
Author :
Chang, Po-Kuang ; Lin, Jium-Ming
Author_Institution :
Inst. of Technol. & Sci., Chung-Hua Univ., Hsin-Chu, Taiwan
Abstract :
This research is to use only PI controllers to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). Comparisons with the previous design with Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also made. Generally, the phase margins are larger for the newly proposed method. This improvement has been verified by MATLAB simulation and practical implementation to reduce the hysteresis effect of the force actuator. Thus the new design is cheaper and valuable.
Keywords :
PI control; actuators; feedback; force control; hysteresis; nonlinear control systems; scanning probe microscopy; transducers; MATLAB simulation; PI controllers; force actuator; hysteresis effect; inner-loop feedback compensation; linear velocity transducer; scanning probe microscope; Coils; Force control; Force feedback; Hydraulic actuators; MATLAB; Magnetic hysteresis; Scanning probe microscopy; Springs; Thermal conductivity; Transducers; Force actuator; Hysteresis effect; LVDT; LVT; Load cell; PI compensator; SPM;
Conference_Titel :
ICCAS-SICE, 2009
Conference_Location :
Fukuoka
Print_ISBN :
978-4-907764-34-0
Electronic_ISBN :
978-4-907764-33-3
