DocumentCode
505345
Title
Realisation of microfluidic components using the casting replication method
Author
Stanciu, Irina ; Obreja, Paula ; Eftime, Laura ; Cristea, Dana ; Muller, Raluca ; Dascalu, Dan
Author_Institution
Nat. Inst. for R&D for Microtechnol. Bucharest, Bucharest, Romania
Volume
1
fYear
2009
fDate
12-14 Oct. 2009
Firstpage
227
Lastpage
230
Abstract
The present paper analysis the suitability of using the polymer casting replication method for the fabrication of microfluidic components. As test structure it is used a passive micromixer with a complex geometry that contains tight angles and several curvatures. There are test three types of masters for the replication, made in silicon, SU-8 and copper.
Keywords
casting; copper; microfluidics; mixers (circuits); silicon; SU-8; copper; microfluidic component; passive micromixer; polymer casting replication method; silicon; Aluminum; Casting; Copper; Etching; Fabrication; Geometry; Microfluidics; Polymers; Silicon; Testing; Casting replication; microfluidics;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2009. CAS 2009. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-4413-7
Type
conf
DOI
10.1109/SMICND.2009.5336562
Filename
5336562
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