Title :
Realisation of microfluidic components using the casting replication method
Author :
Stanciu, Irina ; Obreja, Paula ; Eftime, Laura ; Cristea, Dana ; Muller, Raluca ; Dascalu, Dan
Author_Institution :
Nat. Inst. for R&D for Microtechnol. Bucharest, Bucharest, Romania
Abstract :
The present paper analysis the suitability of using the polymer casting replication method for the fabrication of microfluidic components. As test structure it is used a passive micromixer with a complex geometry that contains tight angles and several curvatures. There are test three types of masters for the replication, made in silicon, SU-8 and copper.
Keywords :
casting; copper; microfluidics; mixers (circuits); silicon; SU-8; copper; microfluidic component; passive micromixer; polymer casting replication method; silicon; Aluminum; Casting; Copper; Etching; Fabrication; Geometry; Microfluidics; Polymers; Silicon; Testing; Casting replication; microfluidics;
Conference_Titel :
Semiconductor Conference, 2009. CAS 2009. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-4413-7
DOI :
10.1109/SMICND.2009.5336562
