Title :
SNOM measurements on metalic nanostructures
Author :
Kusko, C. ; Dinescu, A. ; Rebigan, R. ; Kusko, M. ; Cristea, D.
Author_Institution :
IMT-Bucharest, Bucharest, Romania
Abstract :
We present transmission and reflection near field scanning optical microscopy (SNOM) images on a metallic nanostructure realized by a combination of electron beam lithography (EBL) patterning and liftoff procedure. The structure consists in a square lattice of gold disks of 80 nm height with the diameter of 200 nm and the lattice constant of 400 nm. FDTD simulations were used in order to understand the interaction of the optical near field with the nanostructure and to interpret the SNOM reflection images.
Keywords :
electron beam lithography; finite difference time-domain analysis; gold; nanofabrication; nanolithography; nanostructured materials; near-field scanning optical microscopy; plasmonics; Au; EBL patterning; FDTD simulations; SNOM image reflection; electron beam lithography; lattice constant; liftoff process; metallic nanostructure; reflection near field scanning optical microscopy; size 200 nm; size 80 nm; transmission near field scanning optical microscopy; Electron beams; Electron optics; Gold; Lattices; Lithography; Nanostructures; Optical microscopy; Optical reflection; Scanning electron microscopy; Transmission electron microscopy;
Conference_Titel :
Semiconductor Conference, 2009. CAS 2009. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-4413-7
DOI :
10.1109/SMICND.2009.5336574
