Title :
Design of an optical switch based on electrostatic actuation of a movable fiber
Author :
Kusko, M. ; Voicu, R. ; Tibeica, C.
Author_Institution :
Nat. Inst. for R&D in Microtechnol., Bucharest, Romania
Abstract :
In this paper is presented a theoretical study on two variants of mechanical optical switches based on movable metallized fiber electrostatic actuation. The first variant is based on circular section electrodes (copper wires). The second variant is based on planar electrodes. Here is presented the lay-out, the proposed fabrication flux and the simulation results.
Keywords :
micro-optomechanical devices; optical design techniques; optical fibres; optical switches; circular section electrodes; copper wires; electrostatic actuation; micromechanical optical switches; movable metallized fiber; planar electrodes; Breakdown voltage; Communication switching; Electrodes; Electrostatic actuators; Metallization; Micromechanical devices; Optical design; Optical fibers; Optical switches; Wires;
Conference_Titel :
Semiconductor Conference, 2009. CAS 2009. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-4413-7
DOI :
10.1109/SMICND.2009.5336575