Title :
Surface Acoustic Wave devices and their sensing capabilities
Author :
Avramescu, Viorel ; Bostan, C. ; Serban, B. ; Georgescu, I. ; Costea, S. ; Varachiu, N. ; Cobianu, C.
Author_Institution :
Sensors & Wireless Lab., Honeywell Romania s.r.l., Romania
Abstract :
Since mid 60s, Surface Acoustic Wave (SAW) devices have been using extensively in electronics for telecommunication. However, their potential use in the sensors field is only a matter of recent interest. This paper presents an overview of the sensing mechanisms that allow detection of temperature, strain (for pressure & torque), mass, conductivity (e.g. gas detection) and viscosity by means of SAW based devices. Design and technological challenges are presented, as well as solutions to overcome them in order to obtain reliable devices. The possibility of using such devices as passive wireless sensors is also discussed.
Keywords :
distributed sensors; electrical conductivity measurement; mass measurement; strain sensors; surface acoustic wave sensors; temperature sensors; viscosity measurement; SAW devices; conductivity detection; mass detection; passive wireless sensors; sensing mechanism; strain detection; surface acoustic wave devices; temperature detection; viscosity detection; Acoustic sensors; Acoustic signal detection; Acoustic waves; Capacitive sensors; Conductivity; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; Torque; Viscosity;
Conference_Titel :
Semiconductor Conference, 2009. CAS 2009. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-4413-7
DOI :
10.1109/SMICND.2009.5336615
