A study of 2-dimensional electrostatic torsional micromirror

Many industry experts predict that the future of optical communication system depends on the development of all-optical components for switching and routing purpose. MicroElectroMechanical System (MEMS) technology provides excellent solution to micro-mirror devices for this purpose. This paper reports on the analysis of a 2-Dimensional (2D) electrostatically actuated torsional MEMS micro-mirror. The micro-mirror consists of a traditional gimbal structure allowing steering actions in two orthogonal directions. The device includes two sets of torsion hinges and 4 independent control electrodes. The device was modeled analytically. The equations describing device behaviors were validated using a numerical mathematical software. Key structure performance was simulated by coupled field electrostatic and structural analysis using Finite Element Analysis (FEA) multi-physics modeling software. The prototype device was fabricated using a standard surface micromachining MEMS process and the experimental setup and results have also been discussed in the paper.