Title :
Mass measurement with micromechanical single harmonic oscillators
Author :
Chow, Jacky ; Lai, Yongjun
Author_Institution :
Department of Mechanical and Materials Engineering, Queen´s University, Kingston ON, Canada K7L 3N6
Abstract :
A concept for measuring the inertial mass of analyte matter using single harmonically excited micromechanical oscillators is presented. Proof-of-concept experiments with micron-scale cantilevers demonstrated mass detection of structurally loaded gold via oscillation amplitude variations of the harmonically excited microstructures. The concept is contrasted with a conventional resonance frequency shift mass measurement technique involving frequency sweep excitations.
Keywords :
Cantilever; Harmonic Oscillator; MEMS Sensor; Mass Measurement; Resonance Frequency Shift;
Conference_Titel :
Microsystems and Nanoelectronics Research Conference, 2009. MNRC 2009. 2nd
Conference_Location :
Ottawa, ON, Canada
Print_ISBN :
978-1-4244-4751-0
