Title :
On-wafer human metal model measurements for system-level ESD analysis
Author :
Scholz, M. ; Linten, D. ; Thijs, S. ; Sawada, M. ; Nakaei, T. ; Hasebe, T. ; Lafonteese, D. ; Vashchenko, V. ; Vandersteen, G. ; Hopper, P. ; Groeseneken, G.
Author_Institution :
IMEC vzw, Leuven, Belgium
fDate :
Aug. 30 2009-Sept. 4 2009
Abstract :
An on-wafer human metal model ESD measurement setup with voltage and current waveform measurement capability is presented. Using this setup, typical ESD protection structures and ESD protected circuits are characterized. A correlation between device responses on system-level ESD compared to component-level ESD stress like human body model is found to depend strongly on the device type.
Keywords :
electrostatic discharge; voltage measurement; ESD protected circuits; ESD protection structures; component-level ESD stress; current waveform measurement; on-wafer human metal model measurements; system-level ESD analysis; voltage measurement; Anthropometry; Biological system modeling; Circuit testing; Current measurement; Electrostatic discharge; Hidden Markov models; Humans; IEC standards; Stress; System testing;
Conference_Titel :
EOS/ESD Symposium, 2009 31st
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-58537-176-1
Electronic_ISBN :
978-1-58537-176-1
