Title :
Application of 3-D electromagnetic modeling to ESD design and control for class 0 devices
Author :
Wallash, Albert ; Tazzoli, Augusto
Author_Institution :
Hitachi Global Storage Technol., San Jose, CA, USA
fDate :
Aug. 30 2009-Sept. 4 2009
Abstract :
Full 3-D electromagnetic simulations are used to study the behavior of a shunted device on a transmission line, a grounded factory tool block, and an RF-MEMS switch during an ESD event. Surface current and electric field patterns show multiple current paths for the high-frequency ESD pulse and lead to interesting results. The surface current flow and E-field patterns for the RF-MEMS shunt switch are presented.
Keywords :
electric current measurement; electromagnetic field theory; electrostatic discharge; microswitches; 3-D electromagnetic modeling; ESD design; RF-MEMS switch; class 0 devices; current paths; electric field patterns; grounded factory tool block; high-frequency ESD pulse; shunted device; surface current; transmission line; Coplanar transmission lines; Electromagnetic devices; Electromagnetic modeling; Electrostatic discharge; Production facilities; Protection; Radiofrequency microelectromechanical systems; Switches; Transmission lines; Voltage control;
Conference_Titel :
EOS/ESD Symposium, 2009 31st
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-58537-176-1
Electronic_ISBN :
978-1-58537-176-1
