DocumentCode
505856
Title
An ultra-compact polarization insensitive directional coupler
Author
Shi, Y. ; Anand, S. ; He, S.
Author_Institution
Joint Res. Center of Photonics, R. Inst. of Technol., Stockholm, Sweden
fYear
2008
fDate
Oct. 30 2008-Nov. 2 2008
Firstpage
1
Lastpage
3
Abstract
We investigate the lag-effect in the dry etching process. In one etch step, asymmetric waveguides with a shallow groove in between can be fabricated. This special property can be utilized for the design of an ultra-compact polarization insensitive directional coupler.
Keywords
light polarisation; optical design techniques; optical directional couplers; optical fabrication; sputter etching; ICP-RIE dry etching process; lag-effect; photonic integrated circuits; shallow groove; ultra-compact polarization insensitive directional coupler design; Directional couplers; Dry etching; Epitaxial growth; Indium phosphide; Optical materials; Optical modulation; Optical polarization; Optical waveguides; Scanning electron microscopy; Waveguide discontinuities;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication & Optoelectronic Exposition & Conference, 2008. AOE 2008. Asia
Conference_Location
Shanghai
Print_ISBN
978-1-55752-863-6
Electronic_ISBN
978-1-55752-863-6
Type
conf
Filename
5348682
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