Title :
The effects of TiO2 buffer layer on the properties of flexible ITO thin films
Author :
Fan, Xia ; Zhi-nong, Yu ; Yu-qiong, Li ; Zhi-wei, Zhao
Author_Institution :
Dept. of Opt. Eng., Beijing Inst. of Technol., Beijing, China
fDate :
Oct. 30 2008-Nov. 2 2008
Abstract :
With TiO2 buffer layer added, the properties of Indium-Tin Oxide (ITO) thin films deposited on PET substrates can be efficiently improved. The resistivity of the film reduced, visible transmittance increased and the mechanical property optimized.
Keywords :
bending; buffer layers; cracks; electrical resistivity; indium compounds; semiconductor materials; semiconductor thin films; titanium compounds; ITO-TiO2; PET substrates; buffer layer effects; crack; critical bending rate; flexible thin films; mechanical property; resistivity; visible transmittance; Buffer layers; Conductive films; Conductivity; Displays; Indium tin oxide; Nonhomogeneous media; Polymer films; Positron emission tomography; Sputtering; Substrates;
Conference_Titel :
Optical Fiber Communication & Optoelectronic Exposition & Conference, 2008. AOE 2008. Asia
Conference_Location :
Shanghai
Print_ISBN :
978-1-55752-863-6
Electronic_ISBN :
978-1-55752-863-6
