Title :
Finite element analysis of MEMS based Fabry-Perot optical filter with electrostatic actuation
Author :
Wei, Lei ; Chen, Xuyuan
Author_Institution :
Dept. of Photonics Eng., Tech. Univ. of Denmark, Lyngby, Denmark
fDate :
Oct. 30 2008-Nov. 2 2008
Abstract :
Mechanical properties and tuning ability of MEMS based Fabry-Perot optical filter with electrostatic actuation are investigated. The simulation results demonstrate that the fringing field influence should be taken into account in structure design and modeling.
Keywords :
electrostatic actuators; finite element analysis; micro-optomechanical devices; optical filters; optical tuning; Fabry-Perot optical filter; MEMS; electrostatic actuation; finite element analysis; fringing field; mechanical properties; tuning; Biomembranes; Electrostatic actuators; Electrostatic analysis; Fabry-Perot; Finite element methods; Mechanical factors; Micromechanical devices; Optical filters; Optical tuning; Stress;
Conference_Titel :
Optical Fiber Communication & Optoelectronic Exposition & Conference, 2008. AOE 2008. Asia
Conference_Location :
Shanghai
Print_ISBN :
978-1-55752-863-6
Electronic_ISBN :
978-1-55752-863-6
