Title :
Design and Fabrication of Integrated Multianalyte Sensing Platform With Magnetic Micro-Coils
Author :
Stateikina, Irina ; Eissa, Shimaa ; Zourob, Mohammed
Author_Institution :
INRS, Varennes, QC, Canada
Abstract :
With the recent trends in bio-sensing technology, more attention is being devoted to sensor integration. This paper reports the design and fabrication of magnetically assisted multianalyte sensing platform comprising magnetic micro-coils to trap magnetic beads on the surface of sensing electrodes; integrated sensing electrode array for multianalyte sensing; and the additional micro-coils for removing the unbounded magnetic beads from the sensing electrodes´ surfaces. Prototype device was designed and successfully fabricated using customized fabrication flow. Device´s individual components were tested to ensure repeatability and reproducibility. Sensing platform were additionally tested in order to prove the successful implementation of magnetically assisted manipulation of micro-beads. The results of these tests support the original concept and their summary is presented herein.
Keywords :
biosensors; chemical sensors; coils; magnetic sensors; microelectrodes; microsensors; bio-sensing technology; integrated multianalyte sensing platform; integrated sensing electrode array; magnetic bead trapping; magnetic microcoils; magnetically assisted microbead manipulation; magnetically assisted multianalyte sensing platform; sensor integration; Coils; Electrodes; Fabrication; Layout; Magnetic separation; Sensors; Surface treatment; Integrated biosensor; chemical and biological sensors; magnetic coils;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2013.2261976