DocumentCode :
51063
Title :
AlGaN/GaN-Based HEMTs Failure Physics and Reliability: Mechanisms Affecting Gate Edge and Schottky Junction
Author :
Zanoni, Enrico ; Meneghini, Matteo ; Chini, Alessandro ; Marcon, Denis ; Meneghesso, Gaudenzio
Author_Institution :
Dept. of Inf. Eng., Univ. di Padova, Padua, Italy
Volume :
60
Issue :
10
fYear :
2013
fDate :
Oct. 2013
Firstpage :
3119
Lastpage :
3131
Abstract :
This paper presents a comprehensive review of AlGaN/GaN high electron mobility transistor failure physics and reliability, focusing on mechanisms affecting the gate-drain edge, where maximum electric field and peak temperatures are reached. Physical effects at the origin of device degradation (inverse piezoelectric effect, time-dependent trap formation and percolative conductive paths formation, and electrochemical AlGaN and GaN degradation) are discussed on the basis of literature data and unpublished results. Thermally activated mechanisms involving metal-metal and metal-semiconductor interdiffusion at the gate Schottky junction are also discussed.
Keywords :
III-V semiconductors; aluminium compounds; chemical interdiffusion; electric fields; failure analysis; gallium compounds; high electron mobility transistors; piezoelectricity; semiconductor device reliability; wide band gap semiconductors; AlGaN-GaN; HEMT failure physics; device degradation; electrochemical reaction; gate Schottky junction; gate-drain edge; high electron mobility transistor; inverse piezoelectric effect; literature data; maximum electric field; metal-metal interdiffusion; metal-semiconductor interdiffusion; peak temperatures; percolative conductive paths formation; physical effects; reliability; thermally activated mechanisms; time-dependent trap formation; Aluminum gallium nitride; Degradation; Gallium nitride; HEMTs; Logic gates; MODFETs; Stress; AlGaN/GaN; GaN Schottky contact interdiffusion; GaN oxidation; deep levels; electrochemical reaction; failure mechanisms; failure physics; high electron mobility transistor; piezoelectric effect; reliability; time-dependent breakdown;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2013.2271954
Filename :
6564457
Link To Document :
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