• DocumentCode
    51063
  • Title

    AlGaN/GaN-Based HEMTs Failure Physics and Reliability: Mechanisms Affecting Gate Edge and Schottky Junction

  • Author

    Zanoni, Enrico ; Meneghini, Matteo ; Chini, Alessandro ; Marcon, Denis ; Meneghesso, Gaudenzio

  • Author_Institution
    Dept. of Inf. Eng., Univ. di Padova, Padua, Italy
  • Volume
    60
  • Issue
    10
  • fYear
    2013
  • fDate
    Oct. 2013
  • Firstpage
    3119
  • Lastpage
    3131
  • Abstract
    This paper presents a comprehensive review of AlGaN/GaN high electron mobility transistor failure physics and reliability, focusing on mechanisms affecting the gate-drain edge, where maximum electric field and peak temperatures are reached. Physical effects at the origin of device degradation (inverse piezoelectric effect, time-dependent trap formation and percolative conductive paths formation, and electrochemical AlGaN and GaN degradation) are discussed on the basis of literature data and unpublished results. Thermally activated mechanisms involving metal-metal and metal-semiconductor interdiffusion at the gate Schottky junction are also discussed.
  • Keywords
    III-V semiconductors; aluminium compounds; chemical interdiffusion; electric fields; failure analysis; gallium compounds; high electron mobility transistors; piezoelectricity; semiconductor device reliability; wide band gap semiconductors; AlGaN-GaN; HEMT failure physics; device degradation; electrochemical reaction; gate Schottky junction; gate-drain edge; high electron mobility transistor; inverse piezoelectric effect; literature data; maximum electric field; metal-metal interdiffusion; metal-semiconductor interdiffusion; peak temperatures; percolative conductive paths formation; physical effects; reliability; thermally activated mechanisms; time-dependent trap formation; Aluminum gallium nitride; Degradation; Gallium nitride; HEMTs; Logic gates; MODFETs; Stress; AlGaN/GaN; GaN Schottky contact interdiffusion; GaN oxidation; deep levels; electrochemical reaction; failure mechanisms; failure physics; high electron mobility transistor; piezoelectric effect; reliability; time-dependent breakdown;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2013.2271954
  • Filename
    6564457