Intrinsically Switchable Ferroelectric Contour Mode Resonators

Author

Lee, Victor ; Sis, Seyit Ahmet ; Phillips, J.D. ; Mortazawi, Amir

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA

Volume

61

Issue

8

fYear

2013

fDate

Aug. 2013

Firstpage

2806

Lastpage

2813

Abstract

This paper presents the design and measurement results of intrinsically switchable interdigitated contour mode resonators based on barium titanate (BTO) thin films. The resonators have lithographically defined interdigitated electrodes that determine their resonance frequencies. The BTO thin film exhibits electrostriction, which allows the resonances to be switched on and off. The highest frequency device exhibits series and parallel resonance frequencies of 1.67 and 1.68 GHz and quality factors of 178 and 152, respectively, with the application of a 10-V dc bias. Resonances are turned off by removing the dc bias. This is the first demonstration of an intrinsically switchable interdigitated ferroelectric contour mode resonator.

Keywords

electrodes; electrostriction; ferroelectric devices; interdigital transducers; micromechanical devices; resonance; resonators; thin films; BTO thin films; BaTiO₃; barium titanate; electrostriction; frequency 1.67 GHz; frequency 1.68 GHz; interdigitated contour mode resonators; intrinsically switchable contour mode resonators; lithographically defined interdigitated electrodes; resonance; voltage 10 V; Electrodes; Fabrication; Frequency measurement; Materials; Q-factor; Resonant frequency; Switches; Ferroelectric devices; interdigital transducers; microelectromechanical systems (MEMS);

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2013.2271756

Filename

6564459