Title :
Influence of metastable molecules and negative ions on oxygen discharges
Author :
Grubert, G.K. ; Loffhagen, D.
Author_Institution :
INP Greifswald, Greifswald, Germany
Abstract :
Theoretical studies of low-pressure oxygen discharges in a reactor with plane parallel electrode arrangement are presented. A two-moment fluid description for the particle densities and fluxes coupled with Poisson´s equation has been adapted to analyze the ignition behavior and steady state characteristics of the discharge plasma at pressures between 60 and 100 Pa and voltages between -450 and -1000 V. In particular, it is verified, that metastable molecules and negative ions are of minor importance for the electrical properties at conditions typical of abnormal glow discharges.
Keywords :
Poisson equation; electrodes; electron density; glow discharges; ion density; metastable states; oxygen; plasma chemistry; plasma density; plasma theory; plasma transport processes; O; Poisson equation; discharge plasma; electrical properties; glow discharges; ignition behavior; low-pressure oxygen discharges; metastable molecules; negative ions; particle density; particle flux; plane parallel electrode arrangement; pressure 60 Pa to 100 Pa; steady state characteristics; two-moment fluid; voltage -450 V to -1000 V; Electrodes; Glow discharges; Ignition; Inductors; Metastasis; Plasma density; Plasma properties; Poisson equations; Steady-state; Voltage;
Conference_Titel :
Gas Discharges and Their Applications, 2008. GD 2008. 17th International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-0-9558052-0-2
