Title :
The integration of SWNTs with CMOS IC
Author :
Huang, Jung-Tang ; Lin, Po-Chin ; Chao, Hom-Wi ; Jenq, Kai-Yuan ; Hsu, Hou-Jun ; Tsai, Ting-Chiang
Author_Institution :
Dept. of Inst. of Mechatron. Eng., Nat. Taipei Univ. of Technol., Taipei, Taiwan
Abstract :
This paper presents the interconnection of single - walled carbon nanotube (SWNT) between electrodes on a CMOS integrated circuit chip made by TSMC 0.35 ¿m CMOS process. Using Electroless Nickel and Immersion Gold to cover the electrodes of Al could really increase the current more than 3 orders when SWNTs are connected between electrodes. One of the applications to this chip may be gas sensing, after coupling SWNTs the electrodes will treat by NH3. The electrodes and circuits integration with CMOS IC and its measurement will be described in this paper.
Keywords :
CMOS integrated circuits; aluminium; carbon nanotubes; electrodes; integrated circuit interconnections; Al; C; CMOS integrated circuit chip; Electroless Nickel; Immersion Gold; electrodes; interconnection; single walled carbon nanotube; CMOS integrated circuits; CMOS process; Carbon nanotubes; Coupling circuits; Electrodes; Gold; Integrated circuit interconnections; Integrated circuit measurements; Nickel; Semiconductor device measurement; CMOS; Electroless Nickel Immersion Gold; SWNT;
Conference_Titel :
Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on
Conference_Location :
Genoa
Print_ISBN :
978-1-4244-4832-6
Electronic_ISBN :
1944-9399
