DocumentCode :
511374
Title :
Novel scanning probe concepts for nanoscale electrical characterization
Author :
Sebastian, Aradoaei ; Bhaskaran, Harish ; Pauza, Andrew ; Despont, Michel ; Pozidis, Haris
Author_Institution :
IBM Zurich Res. Lab., Ruschlikon, Switzerland
fYear :
2009
fDate :
26-30 July 2009
Firstpage :
72
Lastpage :
74
Abstract :
There is a significant need for nanoscale electrical characterization of materials. However, unreliable tip apexes have severely hampered the usage of scanning probe techniques for nanoscale electrical characterization. Encapsulated conductive probes with conductive cores comprising of Platinum Silicide and an insulating encapsulation are powerful tools for electrical characterization of materials at the nanoscale. These probes are significantly wear resistant owing to their large tip-sample contact area. They can also sustain high currents. Phase transformation experiments on thin-film stacks comprising of Ge2Sb2Te5 phase change material are presented to demonstrate the applicability of these probes. The large tip-sample contact area and the subsequently increased adhesive force also motivate the usage of these probes in the retraction mode where the tip-sample contact is maintained only by virtue of the adhesive forces. This further enhances the durability of these probes making them valuable tools for nanoscale electrical characterization.
Keywords :
adhesion; antimony compounds; atomic force microscopy; chalcogenide glasses; germanium compounds; multilayers; nanocontacts; nickel alloys; phase change materials; semiconductor thin films; semiconductor-metal boundaries; silicon alloys; solid-state phase transformations; PtSi-Ge2Sb2Te5; adhesive force; conductive cores; conductive mode atomic force microscopy; durability; encapsulated conductive probes; insulating encapsulation; nanoscale electrical characterization; phase change material; phase transformation; scanning probe techniques; thin-film stacks; tip-sample contact area; wear resistance; Conducting materials; Contacts; Dielectrics and electrical insulation; Encapsulation; Nanostructured materials; Phase change materials; Platinum; Probes; Resistance; Silicides; Cantilever probes; Conducting AFM; Phase Change; Platinum Silicide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on
Conference_Location :
Genoa
ISSN :
1944-9399
Print_ISBN :
978-1-4244-4832-6
Electronic_ISBN :
1944-9399
Type :
conf
Filename :
5394565
Link To Document :
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