DocumentCode
511374
Title
Novel scanning probe concepts for nanoscale electrical characterization
Author
Sebastian, Aradoaei ; Bhaskaran, Harish ; Pauza, Andrew ; Despont, Michel ; Pozidis, Haris
Author_Institution
IBM Zurich Res. Lab., Ruschlikon, Switzerland
fYear
2009
fDate
26-30 July 2009
Firstpage
72
Lastpage
74
Abstract
There is a significant need for nanoscale electrical characterization of materials. However, unreliable tip apexes have severely hampered the usage of scanning probe techniques for nanoscale electrical characterization. Encapsulated conductive probes with conductive cores comprising of Platinum Silicide and an insulating encapsulation are powerful tools for electrical characterization of materials at the nanoscale. These probes are significantly wear resistant owing to their large tip-sample contact area. They can also sustain high currents. Phase transformation experiments on thin-film stacks comprising of Ge2Sb2Te5 phase change material are presented to demonstrate the applicability of these probes. The large tip-sample contact area and the subsequently increased adhesive force also motivate the usage of these probes in the retraction mode where the tip-sample contact is maintained only by virtue of the adhesive forces. This further enhances the durability of these probes making them valuable tools for nanoscale electrical characterization.
Keywords
adhesion; antimony compounds; atomic force microscopy; chalcogenide glasses; germanium compounds; multilayers; nanocontacts; nickel alloys; phase change materials; semiconductor thin films; semiconductor-metal boundaries; silicon alloys; solid-state phase transformations; PtSi-Ge2Sb2Te5; adhesive force; conductive cores; conductive mode atomic force microscopy; durability; encapsulated conductive probes; insulating encapsulation; nanoscale electrical characterization; phase change material; phase transformation; scanning probe techniques; thin-film stacks; tip-sample contact area; wear resistance; Conducting materials; Contacts; Dielectrics and electrical insulation; Encapsulation; Nanostructured materials; Phase change materials; Platinum; Probes; Resistance; Silicides; Cantilever probes; Conducting AFM; Phase Change; Platinum Silicide;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on
Conference_Location
Genoa
ISSN
1944-9399
Print_ISBN
978-1-4244-4832-6
Electronic_ISBN
1944-9399
Type
conf
Filename
5394565
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