• DocumentCode
    511374
  • Title

    Novel scanning probe concepts for nanoscale electrical characterization

  • Author

    Sebastian, Aradoaei ; Bhaskaran, Harish ; Pauza, Andrew ; Despont, Michel ; Pozidis, Haris

  • Author_Institution
    IBM Zurich Res. Lab., Ruschlikon, Switzerland
  • fYear
    2009
  • fDate
    26-30 July 2009
  • Firstpage
    72
  • Lastpage
    74
  • Abstract
    There is a significant need for nanoscale electrical characterization of materials. However, unreliable tip apexes have severely hampered the usage of scanning probe techniques for nanoscale electrical characterization. Encapsulated conductive probes with conductive cores comprising of Platinum Silicide and an insulating encapsulation are powerful tools for electrical characterization of materials at the nanoscale. These probes are significantly wear resistant owing to their large tip-sample contact area. They can also sustain high currents. Phase transformation experiments on thin-film stacks comprising of Ge2Sb2Te5 phase change material are presented to demonstrate the applicability of these probes. The large tip-sample contact area and the subsequently increased adhesive force also motivate the usage of these probes in the retraction mode where the tip-sample contact is maintained only by virtue of the adhesive forces. This further enhances the durability of these probes making them valuable tools for nanoscale electrical characterization.
  • Keywords
    adhesion; antimony compounds; atomic force microscopy; chalcogenide glasses; germanium compounds; multilayers; nanocontacts; nickel alloys; phase change materials; semiconductor thin films; semiconductor-metal boundaries; silicon alloys; solid-state phase transformations; PtSi-Ge2Sb2Te5; adhesive force; conductive cores; conductive mode atomic force microscopy; durability; encapsulated conductive probes; insulating encapsulation; nanoscale electrical characterization; phase change material; phase transformation; scanning probe techniques; thin-film stacks; tip-sample contact area; wear resistance; Conducting materials; Contacts; Dielectrics and electrical insulation; Encapsulation; Nanostructured materials; Phase change materials; Platinum; Probes; Resistance; Silicides; Cantilever probes; Conducting AFM; Phase Change; Platinum Silicide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on
  • Conference_Location
    Genoa
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4244-4832-6
  • Electronic_ISBN
    1944-9399
  • Type

    conf

  • Filename
    5394565