DocumentCode
511444
Title
Computational study of an optical NEMS sensor
Author
Lee, Chengkuo ; Xiang, Wenfeng ; Hsiao, Fu-Li
Author_Institution
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fYear
2009
fDate
26-30 July 2009
Firstpage
299
Lastpage
302
Abstract
Optical nanoelectromechanical systems (NEMS) based cantilever sensor embedded with a nanocavity resonator is investigated in this study. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The sensor characteristics of NEMS-cantilevers with various lengths and the same nanocavity structure are studied in air and water.
Keywords
cantilevers; cavity resonators; nanoelectromechanical devices; optical sensors; air holes; cantilever sensor; defect length; nanocavity resonator; nanoelectromechanical systems; optical NEMS sensor; Nanoelectromechanical systems; Nanostructures; Optical computing; Optical resonators; Optical sensors; Resonance; Sensor phenomena and characterization; Sensor systems; Shape; Water; NEMS; microcantilever; nanomechanical; sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on
Conference_Location
Genoa
ISSN
1944-9399
Print_ISBN
978-1-4244-4832-6
Electronic_ISBN
1944-9399
Type
conf
Filename
5394635
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