Title :
Computational study of an optical NEMS sensor
Author :
Lee, Chengkuo ; Xiang, Wenfeng ; Hsiao, Fu-Li
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
Optical nanoelectromechanical systems (NEMS) based cantilever sensor embedded with a nanocavity resonator is investigated in this study. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The sensor characteristics of NEMS-cantilevers with various lengths and the same nanocavity structure are studied in air and water.
Keywords :
cantilevers; cavity resonators; nanoelectromechanical devices; optical sensors; air holes; cantilever sensor; defect length; nanocavity resonator; nanoelectromechanical systems; optical NEMS sensor; Nanoelectromechanical systems; Nanostructures; Optical computing; Optical resonators; Optical sensors; Resonance; Sensor phenomena and characterization; Sensor systems; Shape; Water; NEMS; microcantilever; nanomechanical; sensor;
Conference_Titel :
Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on
Conference_Location :
Genoa
Print_ISBN :
978-1-4244-4832-6
Electronic_ISBN :
1944-9399
