Title :
Fabrication and characterization of nanostructured HfO2 powder and ultra-thin films
Author :
De Moraes Cavalcante, Fabio Henrique ; José, Maria ; Gomes, Ribeiro ; Soares, José Carvalho ; Carbonari, Artur Wilson ; de Abreu Rosseto, D. ; Dias Pereira, Luciano Fabricio ; Mestnik-Filho, José ; Saxena, Rajendra ; Mitani, S.E. ; De Andrade, Leandro Hos
Author_Institution :
Lab. de Interaccoes Hiperfinas e Instrumentacao, Univ. de Lisboa, Lisbon, Portugal
Abstract :
In this work, we report the fabrication process of nanostrutured powder using a Sol-Gel method and HfO2 nanofilms obtained via Pulsed-Laser-Ablation and Electron-Beam Evaporation. The results of the investigation of structural properties and defects of HfO2 nanoparticles and thin films are discussed in terms of the electric quadrupole interactions of the nuclear probe 181Ta within the sample volume measured by the perturbed angular correlation spectroscopy.
Keywords :
angular correlation techniques; electron beam deposition; high-k dielectric thin films; nanoparticles; pulsed laser deposition; quadrupole interactions; sol-gel processing; HfO2; electric quadrupole interactions; electron beam evaporation; nanostructured powder; perturbed angular correlation spectroscopy; pulsed laser ablation; sol-gel method; ultrathin films; Electric variables measurement; Fabrication; Hafnium oxide; Nanoparticles; Nuclear measurements; Powders; Probes; Spectroscopy; Transistors; Volume measurement; component; electron beam evaporation; perturbed angular correlation; pulsed-laser-ablation; thin films;
Conference_Titel :
Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on
Conference_Location :
Genoa
Print_ISBN :
978-1-4244-4832-6
Electronic_ISBN :
1944-9399
