DocumentCode :
511450
Title :
Colloidal crystal-assisted lithography for preparation of 2D patterned arrays
Author :
Sun, Zhiqiang ; Yang, Bai
Author_Institution :
State Key Lab. of Supramolecular Struct. & Mater., Jilin Univ., Changchun, China
fYear :
2009
fDate :
26-30 July 2009
Firstpage :
284
Lastpage :
286
Abstract :
In this paper we report our recent work on preparing two dimensional patterned microstructure arrays using three dimensional colloidal crystals as templates, namely colloidal crystal-assisted lithography. Two alternative processes are described and involved in the colloidal crystal-assisted lithography. One is based upon imprinting the polymer films with three dimensional silica colloidal crystals, and the other chemically depositing Ag microstructures on Au substrates covered by polymer colloidal crystals. By varying the experimental conditions in the colloidal crystal-assisted lithography process, we can intentionally control the morphologies of the resulting microstructures. The resultant Ag-coated Au substrates can be used as surface-enhanced Raman scattering substrates, and would provide an ideal system for the mechanism study of surface-enhanced Raman scattering.
Keywords :
colloidal crystals; gold; nanolithography; polymer films; silver; surface enhanced Raman scattering; 2D patterned arrays; 3D silica colloidal crystals; Ag; Au; colloidal crystal-assisted lithography; patterned microstructure arrays; polymer colloidal crystals; polymer films; surface-enhanced Raman scattering substrates; Colloidal crystals; Crystal microstructure; Gold; Lithography; Polymer films; Raman scattering; Scanning electron microscopy; Silicon compounds; Substrates; Surface morphology; 2D; colloidal crystals-assisted lithography; patterend Array; surface-enhanced Raman;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on
Conference_Location :
Genoa
ISSN :
1944-9399
Print_ISBN :
978-1-4244-4832-6
Electronic_ISBN :
1944-9399
Type :
conf
Filename :
5394641
Link To Document :
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