• DocumentCode
    511519
  • Title

    Multiscale thermoelectric imaging for fast metrology and manipulation

  • Author

    Cannara, Rachel J. ; Sebastian, Aradoaei ; Gotsmann, Bernd ; Rothuizen, Hugo

  • Author_Institution
    IBM Zurich Res. Lab., Ruschlikon, Switzerland
  • fYear
    2009
  • fDate
    26-30 July 2009
  • Firstpage
    781
  • Lastpage
    783
  • Abstract
    The latest scanning probe technology permits the same probe tip to carry out all of the imaging, characterization and manipulation operations. This multifunctional capability assists in a wide variety of applications, but low endurance and speed continue to be important problems to solve. We decouple the imaging and manipulation aspects of a probe device by implementing a thermoelectric imaging mode that functions entirely out of contact. In this new "off-contact mode," speeds can be accelerated up to two orders of magnitude relative to typical scanning probe microscopy scan speeds without damaging the probe tip. Combined with the nanoscale resolution provided by the tip while in contact, a single scanning probe can perform imaging and manipulation with multiscale resolution.
  • Keywords
    cantilevers; elemental semiconductors; infrared imaging; nanoelectromechanical devices; scanning probe microscopy; silicon; thermoelectricity; Si; cantilever probe; high speed imaging; manipulation; metrology; multiscale resolution; multiscale thermoelectric imaging; nanoscale resolution; off-contact mode; probe device; probe tip; scanning probe technology; scanning thermal microscopy; single scanning probe; High-resolution imaging; Image resolution; Metrology; Nanobioscience; Optical imaging; Probes; Signal resolution; Surface topography; Thermal resistance; Thermoelectricity; Metrology; microfabricated probes; multiscale imaging; nanomanipulation; non-contact imaging; thermal sensing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on
  • Conference_Location
    Genoa
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4244-4832-6
  • Electronic_ISBN
    1944-9399
  • Type

    conf

  • Filename
    5394712