Title :
Surface Micromachined Accelerometer with Increased Working Capacitance and Force Feedback Operation
Author :
Wenk, B. ; Ramos-Martos, J. ; Fehrenbach, M. ; Lange, P. ; Offenberg, M. ; Riethmuller, W.
Author_Institution :
Fraunhofer-Institut Siliziumtechnologie, Dillenburgerstr. 53, D- 14199 Berlin, Germany, phone: + 49 30 82998-304, fax: +49 30 82998-199
Abstract :
A surface micromachined accelerometer has been realized by using a 10¿m thick polysilicon layer. The sensor is designed as a differential capacitor and works in a force feedback mode to improve the sensor performance The evaluation circuit is realized as a seperate chip. The measured closed loop sensitivity is 8m V/g, the bandwidth is about 10kHz. A resolution of 0.1g and a linearity error of less than 1% is achieved for an measurement range of +/- 100 g.
Keywords :
Accelerometers; Capacitance; Capacitive sensors; Capacitors; Electrodes; Fingers; Force feedback; Silicon; Springs; Voltage;
Conference_Titel :
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
Conference_Location :
The Hague, The Netherlands
