DocumentCode

513698

Title

Low thermal budget 6 nm furnace N2O-nitrided gate oxides

Author

Paulzen, G.M. ; Hutten, E.K.H. ; Meyssen, V.M.H.

Author_Institution

Philips Research Laboratories, 5656 AA Eindhoven, The Netherlands.

fYear

1995

fDate

25-27 Sept. 1995

Firstpage

239

Lastpage

242

Keywords

Area measurement; Capacitors; Charge measurement; Current measurement; Design for quality; Electric breakdown; Furnaces; MOSFETs; Nitrogen; Oxidation;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European

Conference_Location

The Hague, The Netherlands

Print_ISBN

286332182X

Type

conf

Filename

5435957