DocumentCode :
513698
Title :
Low thermal budget 6 nm furnace N2O-nitrided gate oxides
Author :
Paulzen, G.M. ; Hutten, E.K.H. ; Meyssen, V.M.H.
Author_Institution :
Philips Research Laboratories, 5656 AA Eindhoven, The Netherlands.
fYear :
1995
fDate :
25-27 Sept. 1995
Firstpage :
239
Lastpage :
242
Keywords :
Area measurement; Capacitors; Charge measurement; Current measurement; Design for quality; Electric breakdown; Furnaces; MOSFETs; Nitrogen; Oxidation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
Conference_Location :
The Hague, The Netherlands
Print_ISBN :
286332182X
Type :
conf
Filename :
5435957
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=513698
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