Title :
Low thermal budget 6 nm furnace N2O-nitrided gate oxides
Author :
Paulzen, G.M. ; Hutten, E.K.H. ; Meyssen, V.M.H.
Author_Institution :
Philips Research Laboratories, 5656 AA Eindhoven, The Netherlands.
Keywords :
Area measurement; Capacitors; Charge measurement; Current measurement; Design for quality; Electric breakdown; Furnaces; MOSFETs; Nitrogen; Oxidation;
Conference_Titel :
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
Conference_Location :
The Hague, The Netherlands