Title :
Soft Programming in Scaled Flash EEPROM Cells
Author :
Esseni, D. ; Selmi, L. ; Bez, R. ; Ravazzi, L. ; Sangiorgi, E.
Author_Institution :
DEIS, Viale Risorgimento 2, 40136 Bologna, Italy
Abstract :
This paper reports new results on programming performances and soft programming characteristics of scaled Flash memory cells fabricated with conventional and innovative p-pocket technologies. Soft-programming lifetimes of several devices are derived according to different procedures based on the effective temperature model of low voltage hot carriers (ETM). The results show that: a) these procedures, although not fulfilling all the assumptions of the ETM, provide lifetime estimations in good reciprocal agreement; b) constant read voltages VDR = 1 ±0.1V can be maintained in scaled p-pocket cells only if the cell architecture is tuned to comply with soft-programming requirements. The improved current drive capability of these cells can be traded in order to get more reliable operation at constant read current.
Keywords :
EPROM; Extrapolation; Flash memory cells; Hot carriers; Implants; Life estimation; Lifetime estimation; Low voltage; Microelectronics; Temperature;
Conference_Titel :
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
Conference_Location :
The Hague, The Netherlands