DocumentCode :
513773
Title :
Micromachined flow sensors using a piezoresistive cantilever paddle
Author :
Su, Y. ; Evans, A.G.R. ; Brunnschweiler, A. ; Ensell, G.
Author_Institution :
Dept. of Electronics and Computer Science, University of Southampton, Highfield, Southampton SO17 1BJ, UK. Email:ys1@soton.ac.uk
fYear :
1996
fDate :
9-11 Sept. 1996
Firstpage :
717
Lastpage :
720
Abstract :
A piezoresistive silicon cantilever paddle for measuring gas flow is presented. The paddle square is attached by two cantilever arms with piezoresistive sensing element implanted on the root of the arms. The cantilever paddle is 500 ¿m long, 40 ¿m wide and 2.32 ¿m thick, with a paddle square of 200 by 200 ¿m. The device resistance change is measured using a Phase Sensitive Detector (PSD) method when the piezoresistor on the device is taken as one of four resistors in ac Wheatstone bridge biased at a voltage of 2.0 V and 10 kHz. The measured airflow velocity is in the range 0 - 22.0 m/sec. The minimum detectable airflow velocity is about 10 cm/sec in our PSD experimental setup. The output signals of the device are in reasonable agreement with the theoretical predictions, which are proportional to the flow velocity squared in the drag measurement mode.
Keywords :
Arm; Detectors; Electrical resistance measurement; Fluid flow; Fluid flow measurement; Phase detection; Phase measurement; Piezoresistance; Silicon; Velocity measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location :
Bologna, Italy
Print_ISBN :
286332196X
Type :
conf
Filename :
5436052
Link To Document :
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