• DocumentCode
    513797
  • Title

    Accurate Threshold Voltage Measurement for Use with SOISPICE

  • Author

    Wainwright, S.P. ; Hall, S. ; Flandre, D.

  • Author_Institution
    Dept. of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3BX, U.K.
  • fYear
    1995
  • fDate
    25-27 Sept. 1995
  • Firstpage
    753
  • Lastpage
    756
  • Abstract
    The thin-film nature of silicon on insulator (SOI) material complicates considerably the extraction of accurate threshold voltage (VTf) values. This work assesses the accuracy of the standard VTf extraction techniques and presents an alternative method, independent of series resistance, with improved accuracy. The improved accuracy of the threshold voltage measurement enables physical parameters such as flatband voltages and oxide thicknesses to be calculated more accurately. As SOI technology is an important contender for low voltage/low power, high temperature and ULSI circuit applications it is imperative to have an established, accurate modelling facility such as SOISPICE. We show that our method of measuring VTf is compatible with SOISPICE. Simulation results show that using an inappropriate VTf extraction technique can cause significant errors in the transient response of SOI circuits at low voltages.
  • Keywords
    Circuits; Electrical resistance measurement; Low voltage; Semiconductor thin films; Silicon on insulator technology; Temperature; Thickness measurement; Threshold voltage; Ultra large scale integration; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
  • Conference_Location
    The Hague, The Netherlands
  • Print_ISBN
    286332182X
  • Type

    conf

  • Filename
    5436119