DocumentCode
513797
Title
Accurate Threshold Voltage Measurement for Use with SOISPICE
Author
Wainwright, S.P. ; Hall, S. ; Flandre, D.
Author_Institution
Dept. of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3BX, U.K.
fYear
1995
fDate
25-27 Sept. 1995
Firstpage
753
Lastpage
756
Abstract
The thin-film nature of silicon on insulator (SOI) material complicates considerably the extraction of accurate threshold voltage (VTf ) values. This work assesses the accuracy of the standard VTf extraction techniques and presents an alternative method, independent of series resistance, with improved accuracy. The improved accuracy of the threshold voltage measurement enables physical parameters such as flatband voltages and oxide thicknesses to be calculated more accurately. As SOI technology is an important contender for low voltage/low power, high temperature and ULSI circuit applications it is imperative to have an established, accurate modelling facility such as SOISPICE. We show that our method of measuring VTf is compatible with SOISPICE. Simulation results show that using an inappropriate VTf extraction technique can cause significant errors in the transient response of SOI circuits at low voltages.
Keywords
Circuits; Electrical resistance measurement; Low voltage; Semiconductor thin films; Silicon on insulator technology; Temperature; Thickness measurement; Threshold voltage; Ultra large scale integration; Voltage measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1995. ESSDERC '95. Proceedings of the 25th European
Conference_Location
The Hague, The Netherlands
Print_ISBN
286332182X
Type
conf
Filename
5436119
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