Title :
Halo Doping for Good Performance and Reliability in 0.25 μm CMOS Technology
Author :
Hendriks, Marton ; Badenes, Goncal ; Deferm, Ludo
Author_Institution :
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
Abstract :
In this paper a structure with a large overlap in conjunction with halos is presented for the n-MOSFET which gives a compromise between good short channel behaviour and an excellent reliability.
Conference_Titel :
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location :
Bologna, Italy
