Title :
Low Dielectric Constant Spin-on-Polymers for Interlayer Dielectric Applications
Author :
Sun, S.C. ; Chuang, Y.C.
Author_Institution :
National Nano Device Laboratory, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
Abstract :
This paper will present the characterization results of two low dielectric constant methylsilsesquioxane spin-on polymers and a conventional siloxane SOG. The chemical bonding structure, thermal stability, stress-temperature variations and the leakage current will be examined.
Keywords :
Bonding; Chemicals; Curing; Dielectric constant; Dielectric materials; Dielectric measurements; Leakage current; Polymer films; Sun; Thermal stresses;
Conference_Titel :
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location :
Bologna, Italy
