Title :
On-Board Processing in Chemical Microsystems
Author :
Davide, F.A.M. ; Natale, C. Di ; Saggio, G. ; D´Amico, A.
Author_Institution :
Dipartimento di Ingegneria Elettronica, UniversitÃ\xa0 di Roma ``Tor Vergata´´´´, Via della Ricerca Scientifica, 00133 Roma, Italy
Abstract :
Integration of circuits with micromechanical systems is still limited. Chemical microsystems require many specific functions not needed nor requested by other applications. Here a brief review of the functions and requirements that show an acute need for innovative electronics is provided.
Keywords :
Chemical analysis; Chemical processes; Circuit testing; Control systems; Electronic equipment testing; Fluid flow control; Pressure control; Sampling methods; Sensor systems; Silicon;
Conference_Titel :
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location :
Bologna, Italy
