DocumentCode
513879
Title
Combined Opto-Electronical Simulation of Metal-Semiconductor-Metal (MSM) Photodetectors
Author
Korne, T.O. ; Krumbein, U. ; Bomholt, L.H. ; Fichtner, W.
Author_Institution
Integrated Systems Laboratory, ETH Zÿrich, CH-8092 Zÿrich
fYear
1996
fDate
9-11 Sept. 1996
Firstpage
391
Lastpage
394
Abstract
A complete opto-electronical simulation of a metal-semiconductor-metal (MSM) photodetector is presented. We combined rigorous electromagnetic theory for modelling the light propagation with electronic device simulation methods. Different optical designs were compared with respect to efficiency and response times.
Keywords
Circuit simulation; Detectors; Electromagnetic modeling; Electromagnetic propagation; Geometrical optics; Gratings; Maxwell equations; Optical propagation; Optical sensors; Photodetectors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location
Bologna, Italy
Print_ISBN
286332196X
Type
conf
Filename
5436239
Link To Document