Title :
Combined Opto-Electronical Simulation of Metal-Semiconductor-Metal (MSM) Photodetectors
Author :
Korne, T.O. ; Krumbein, U. ; Bomholt, L.H. ; Fichtner, W.
Author_Institution :
Integrated Systems Laboratory, ETH Zÿrich, CH-8092 Zÿrich
Abstract :
A complete opto-electronical simulation of a metal-semiconductor-metal (MSM) photodetector is presented. We combined rigorous electromagnetic theory for modelling the light propagation with electronic device simulation methods. Different optical designs were compared with respect to efficiency and response times.
Keywords :
Circuit simulation; Detectors; Electromagnetic modeling; Electromagnetic propagation; Geometrical optics; Gratings; Maxwell equations; Optical propagation; Optical sensors; Photodetectors;
Conference_Titel :
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location :
Bologna, Italy
