Title :
Results of the Superlattice Devices Project in Japan
Author :
Moriya, Tetsuo ; Ogasawara, Kazuto ; Maeda, Shuku
Author_Institution :
Research and Development Association for Future Electron Devices, Fukide Building No. 2, 4-1-21 Toranomon, Minato-ku Tokyo JAPAN
Abstract :
A Japanese national project, the ``Superlattice Devices Project,´´ was started in 1981 to develop key technologies for super high-speed data processing and multifunction devices with controlling structural compositions and utilizing new electronic effects. The main results of the project are summarized below.
Keywords :
Data processing; Electron devices; Fabrication; Gallium arsenide; Laboratories; Metallic superlattices; Microwave transistors; Molecular beam epitaxial growth; Research and development; Silicides;
Conference_Titel :
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location :
Montreux, Switzerland
