Title :
A Planar Reach-through p+np+ Device for the Detection of Surface Acoustic Waves
Author :
Haartsen, J.C. ; Venema, A.
Author_Institution :
Electrical Engineering Department, Delft University of Technology, the Netherlands
Abstract :
A novel SAW detector is presented, It basically consists of a planar reach-through p+np+ structure covered by a piezoelectric ZnO layer. Mechanical displacements in the ZnO layer will induce electric fields that penetrate into the depleted gap between the two p+ junctions. There they will modulate the potential distribution, which results in a modulation of the injected current. Experiments at 80 MHz demonstrated its operation.
Keywords :
Acoustic signal detection; Acoustic waves; Current density; Diodes; Electrodes; Piezoelectric devices; Silicon; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
