Author :
D´Amico, A. ; Faccio, Marco ; Ferri, G. ; Giannini, I.
Author_Institution :
University of L´´Aquila - Department of Electrical Engineering, Monteluco di Roio - 67100 L´´AQUILA - Italy
Abstract :
This paper takes into consideration some basic devices which are utilised for the realization of chemical sensors. In particular metel-oxide capacitors (MOS), Field Effect Transistors (MOSFET), pyroelectric systems, surface acoustic wave devices (SAW), ion selective FET, immunosensors, electrochemical devices and thermopiles are presented and commented.
Keywords :
Capacitive sensors; Chemical engineering; Chemical industry; Chemical processes; Chemical sensors; Chemical technology; Hydrogen; Inorganic chemicals; Organic chemicals; Temperature sensors;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
