Title :
Integration of GaAs LEDs on Si by Epi-lift-off
Author :
Pollentier, I. ; De Dobbelaere, P. ; De Pestel, F. ; Van Daele, Peter ; Demeester, P.
Author_Institution :
University of Gent (LEA) - IMEC, St. Pietersnieuwstraat 41, B-9000, Gent, Belgium
Keywords :
Epitaxial growth; Epitaxial layers; Etching; Gallium arsenide; Inorganic materials; Integrated circuit interconnections; Light emitting diodes; Metallization; Monolithic integrated circuits; Substrates;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany