DocumentCode
513970
Title
Integration of GaAs LEDs on Si by Epi-lift-off
Author
Pollentier, I. ; De Dobbelaere, P. ; De Pestel, F. ; Van Daele, Peter ; Demeester, P.
Author_Institution
University of Gent (LEA) - IMEC, St. Pietersnieuwstraat 41, B-9000, Gent, Belgium
fYear
1989
fDate
11-14 Sept. 1989
Firstpage
401
Lastpage
404
Keywords
Epitaxial growth; Epitaxial layers; Etching; Gallium arsenide; Inorganic materials; Integrated circuit interconnections; Light emitting diodes; Metallization; Monolithic integrated circuits; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location
Berlin, Germany
Print_ISBN
0387510001
Type
conf
Filename
5436582
Link To Document