Crack Formation and Selective Growth in MOVPE-GaAs on Si and its Application to OEICs

Author

Ackaert, A. ; Buydens, L. ; Lootens, D. ; Van Daele, Peter ; Demeester, P.

Author_Institution

University of Gent, (L.E.A.-IMEC), St. Pietersnieuwstraat 41, B-9000 Gent, Belgium

fYear

1989

fDate

11-14 Sept. 1989

Firstpage

397

Lastpage

400

Keywords

Cooling; Epitaxial growth; Gallium arsenide; Lattices; Petroleum; Shape; Temperature; Tensile stress; Thermal expansion; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Device Research Conference, 1989. ESSDERC '89. 19th European

Conference_Location

Berlin, Germany

Print_ISBN

0387510001

Type

Filename

5436585

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