Title :
High Performance Submicron SILO Process for High Density EPROM Memories Using Rapid Thermal Nitridation of Silicon
Author :
Deleonibus, S. ; Molle, P. ; Lajzerowicz, J. ; Guillaumot, B. ; Laporte, P. ; Bergemont, A.
Author_Institution :
LETI CENG Avenue des Martyrs, 38041 Grenoble CEDEX France
Keywords :
Cleaning; Diodes; Dry etching; EPROM; Lead compounds; Oxidation; Plasma applications; Rapid thermal processing; Silicon; Voltage;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
