Title :
Assessment of Semi-insulating InP: Fe Layers for Substrate Applications
Author :
Grote, N. ; Bach, H.-G. ; Feifel, TH. ; Franke, D. ; Harde, P. ; Sartorius, B. ; Wolfram, P.
Author_Institution :
Heinrich-Hertz-Institut f?r Nachrichtentechnik Berlin GmbH, Einsteinufer 37, D-1000 Berlin (FRG)
Abstract :
Semi-insulating InP epi-substrates formed by epitaxial InP:Fe layers on suitable base substrates are proposed and investigated. Compared to standard commercial s. i. bulk substrates, such epi-substrate offer lower defect densities, well-controllable Fe-levels and considerably higher specific resistivities.
Keywords :
Conductivity; Doping; Etching; Fabrication; Indium phosphide; Insulation; Iron; Substrates; Thickness measurement; Voltage;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
