DocumentCode
514042
Title
Assessment of Semi-insulating InP: Fe Layers for Substrate Applications
Author
Grote, N. ; Bach, H.-G. ; Feifel, TH. ; Franke, D. ; Harde, P. ; Sartorius, B. ; Wolfram, P.
Author_Institution
Heinrich-Hertz-Institut f?r Nachrichtentechnik Berlin GmbH, Einsteinufer 37, D-1000 Berlin (FRG)
fYear
1989
fDate
11-14 Sept. 1989
Firstpage
67
Lastpage
70
Abstract
Semi-insulating InP epi-substrates formed by epitaxial InP:Fe layers on suitable base substrates are proposed and investigated. Compared to standard commercial s. i. bulk substrates, such epi-substrate offer lower defect densities, well-controllable Fe-levels and considerably higher specific resistivities.
Keywords
Conductivity; Doping; Etching; Fabrication; Indium phosphide; Insulation; Iron; Substrates; Thickness measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location
Berlin, Germany
Print_ISBN
0387510001
Type
conf
Filename
5436667
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