Title :
The Voltage-Doping Transformation a New Approach to the Modelling of MOSFET Short-Channel Effects
Author :
Skotnicki, Tomasz ; Merckel, UGrard ; Pedron, Thierry
Author_Institution :
CNET-CNS, BP 98, Chemin du Vieux Chêne, 38243 MEYLAN, FRANCE; Member of the ITE-CEMI, Warsaw, Poland
Abstract :
In this paper we show that the influence of the drain-source field on the potential barrier height is physically equivalent and can be replaced by the reduction in channel doping concentration according to the following formula N*= N-2csV*DS/qL2 derived from the 2-d Poisson equation. Thus the actual barrier height for any drain bias VDS and channel length L can be easily calculated using the well-known 1-d (long-channel) solutions. This simple but general procedure, hereafter called the Voltage-Doping Transformation (VDT) has been examined with fairly good results by comparison of the analytically calculated potential distributions with 2-d numerical simulation. An examplary application of the VDT to threshold voltage calculations is also shown.
Keywords :
Analytical models; Cathodes; Current measurement; Doping; MOSFET circuits; Numerical simulation; Poisson equations; Semiconductor process modeling; Threshold voltage; Very large scale integration;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy