DocumentCode
514069
Title
Electrical evaluation of SWAMI structures
Author
Cavioni, T. ; Gualandris, F.
Author_Institution
SGS Microelettronica, Central R&D, Via C. Olivetti 2, 20041 Agrate Brianza (MI)-Italy
fYear
1987
fDate
14-17 Sept. 1987
Firstpage
593
Lastpage
597
Abstract
The SWAMI electrial properties have been studied focusing over the subthreshold voltage, Junction leakage and latch-up phenomena. The data below reported have been compared with the equivalent LOCOS processed structures.
Keywords
Art; Boron; Etching; Frequency; Implants; Inductors; Lattices; Leakage current; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location
Bologna, Italy
Print_ISBN
0444704779
Type
conf
Filename
5436711
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