Title :
Electrical evaluation of SWAMI structures
Author :
Cavioni, T. ; Gualandris, F.
Author_Institution :
SGS Microelettronica, Central R&D, Via C. Olivetti 2, 20041 Agrate Brianza (MI)-Italy
Abstract :
The SWAMI electrial properties have been studied focusing over the subthreshold voltage, Junction leakage and latch-up phenomena. The data below reported have been compared with the equivalent LOCOS processed structures.
Keywords :
Art; Boron; Etching; Frequency; Implants; Inductors; Lattices; Leakage current; Silicon; Voltage;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy
