DocumentCode
514070
Title
Small Geometry NMOS Transistors in Silicon-on-Sapphire using Rapid Annealed Source/Drains and Improved Crystalline Quality Silicon Films
Author
Field, M ; Cowern, N.E.B. ; Godfrey, D J
Author_Institution
GEC Research Limited, Hirst Research Centre, East Lane, Wembley, Middlesex HA9 7PP
fYear
1987
fDate
14-17 Sept. 1987
Firstpage
533
Lastpage
535
Keywords
Annealing; CMOS technology; Crystalline materials; Crystallization; Geometry; Implants; MOSFETs; Parasitic capacitance; Semiconductor films; Silicon on insulator technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location
Bologna, Italy
Print_ISBN
0444704779
Type
conf
Filename
5436713
Link To Document