Isolation Techniques in Power ICs with Vertical Current Flow

Author

Zambrano, R. ; Ferla, G. ; Musumeci, S. ; Paparo, M.

Author_Institution

S G S Microelettronica s.p.a., Stradale Primosole, 50 - 95121 Catania (Italy)

fYear

1987

fDate

14-17 Sept. 1987

Firstpage

653

Lastpage

656

Keywords

Fabrication; Power integrated circuits; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Device Research Conference, 1987. ESSDERC '87. 17th European

Conference_Location

Bologna, Italy

Print_ISBN

0444704779

Type

Filename

5436722

Link To Document