Title :
Isolation Techniques in Power ICs with Vertical Current Flow
Author :
Zambrano, R. ; Ferla, G. ; Musumeci, S. ; Paparo, M.
Author_Institution :
S G S Microelettronica s.p.a., Stradale Primosole, 50 - 95121 Catania (Italy)
Keywords :
Fabrication; Power integrated circuits; Voltage;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy
