DocumentCode
514146
Title
2-D Effects During Isolation Process: Experiments and Simulation
Author
Seidl, A. ; Huber, V.
Author_Institution
Institut fÿr Festkörpertechnologie, Paul Gerhardt Allee 42, D-8000 Mÿnchen 60
fYear
1987
fDate
14-17 Sept. 1987
Firstpage
441
Lastpage
444
Abstract
SEMIROX bird´s beaks were processed for different sets of parameters including variation of the buffer oxide thickness, nitride thickness and temperature. A numerical simulator is used to discuss two-dimensional stress-and diffusion effects.
Keywords
Beak; Differential equations; Etching; Numerical simulation; Oxidation; Silicon; Stress; Temperature; Thickness measurement; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location
Bologna, Italy
Print_ISBN
0444704779
Type
conf
Filename
5436958
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