Title :
2-D Effects During Isolation Process: Experiments and Simulation
Author :
Seidl, A. ; Huber, V.
Author_Institution :
Institut fÿr Festkörpertechnologie, Paul Gerhardt Allee 42, D-8000 Mÿnchen 60
Abstract :
SEMIROX bird´s beaks were processed for different sets of parameters including variation of the buffer oxide thickness, nitride thickness and temperature. A numerical simulator is used to discuss two-dimensional stress-and diffusion effects.
Keywords :
Beak; Differential equations; Etching; Numerical simulation; Oxidation; Silicon; Stress; Temperature; Thickness measurement; Viscosity;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy
