• DocumentCode
    514177
  • Title

    A Novel Method for Dimensional Loss Characterization

  • Author

    Caprara, P. ; Bergonzoni, C ; Cavioni, T.

  • Author_Institution
    SGS-Thomson Microelectronics, Via C. Olivetti 2, Agrate Brianza (MI), Italy
  • fYear
    1988
  • fDate
    13-16 Sept. 1988
  • Abstract
    The present tendency toward devices scaling in VLSI technology makes more and more difficult the electrical characterization of channel dimensions, The narrow channel effects have had a great consideration for what concern device modeling, but a minor attention about dimensional loss problems. The aim of thi work is to propos an effective width characterization method based on transconductance and not affected by the typical problems related to narrowv channel devices. Moreover, a compared analysis of this method to an other one previously proposed [1] is shown pointing out the phenomenological differences.
  • Keywords
    EPROM; Implants; Ion implantation; Microelectronics; Performance analysis; Process control; Temperature; Thickness control; Threshold voltage; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1988. ESSDERC '88. 18th European
  • Conference_Location
    Montpellier, France
  • Print_ISBN
    2868830994
  • Type

    conf

  • Filename
    5437023