DocumentCode
514177
Title
A Novel Method for Dimensional Loss Characterization
Author
Caprara, P. ; Bergonzoni, C ; Cavioni, T.
Author_Institution
SGS-Thomson Microelectronics, Via C. Olivetti 2, Agrate Brianza (MI), Italy
fYear
1988
fDate
13-16 Sept. 1988
Abstract
The present tendency toward devices scaling in VLSI technology makes more and more difficult the electrical characterization of channel dimensions, The narrow channel effects have had a great consideration for what concern device modeling, but a minor attention about dimensional loss problems. The aim of thi work is to propos an effective width characterization method based on transconductance and not affected by the typical problems related to narrowv channel devices. Moreover, a compared analysis of this method to an other one previously proposed [1] is shown pointing out the phenomenological differences.
Keywords
EPROM; Implants; Ion implantation; Microelectronics; Performance analysis; Process control; Temperature; Thickness control; Threshold voltage; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1988. ESSDERC '88. 18th European
Conference_Location
Montpellier, France
Print_ISBN
2868830994
Type
conf
Filename
5437023
Link To Document