Title :
3-D Adaptive Simulation of Thermal Oxidation Process
Author :
Yoon, S.H. ; Lee, J.H. ; Won, T.Y. ; Cho, B.J. ; Kim, J.C. ; Lee, D.H.
Author_Institution :
Department of Electronic Materials and Devices Engineering, Inha University, 253 Yonghyun-Dong, Nam-Ku, Inchon, 402-751, KOREA
Abstract :
This paper presents the efficient adaptive mesh generator developed for our three-dimensional process simulation in INPROS system. The mesh generator adopted the tetrahedralization for our mesh refinement and elimination algorithm to maximize the efficiency together with minimum calculation error. The island structure was employed to verify the adaptiveness and efficiency of the developed 3-D INPROS system.
Keywords :
Electronics industry; Finite element methods; Industrial electronics; Mesh generation; Object oriented modeling; Oxidation; Refining; Research and development; Surface topography; Very large scale integration;
Conference_Titel :
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location :
Bologna, Italy
